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Maintenance Reliability Engineer Jobs in Illinois

Process Reliability Engineer

Aurora, IL · On-site

$101K - $127K/yr

Job Title: Process Reliability Engineer The Role Entegris is currently seeking a Process ... Build and maintain the Criticality Analysis plus Critical Spare Parts assessments for all ...

Director of Cloud SRE

Downers Grove, IL · On-site +1

$57 - $75.50/hr

Ensure the team maintains hands-on technical currency - reviewing designs, contributing to ... Deep understanding of core SRE principles: SLIs/SLOs, error budgets, incident management and ...

New

Reliability Engineer

Granite City, IL · On-site

$97K - $122K/yr

Maintains compliance with appropriate federal, state and local safety and/or environmental ... engineering to ensure reliability principles are factored into project design and purchasing ...

Senior Site Reliability Engineer

Chicago, IL · On-site

$58.75 - $78/hr

Develop and maintain APIs, microservices, automation, and internal engineering tools. * Contribute ... Reliability & Observability * Own and improve the reliability, availability, performance, and ...

Develop and maintain APIs, microservices, automation, and internal engineering tools. * Contribute ... Reliability & Observability * Own and improve the reliability, availability, performance, and ...

New

Sr. Site Reliability Engineer (SRE)

Chicago, IL · On-site

$58.75 - $78/hr

The Sr. Site Reliability Engineer will be responsible for building and operating production-grade ... Configure CNI plugins and network segmentation for research workloads. • Develop and maintain ...

Developing and maintaining a deep technical knowledge of the iManage platform services, with the ... Engaging with Engineering and SRE teams to improve supportability through internal tooling and ...

Site Reliability Engineer

Chicago, IL · On-site +1

$100K - $120K/yr

Overview The Site Reliability Engineer is a key force behind improving Origami's time to resolution ... Maintains and configures core observability tools to ensure optimum performance and key metrics ...

Showing results 41-60

Maintenance Reliability Engineer information

See Illinois salary details

$12

$25

$49

How much do maintenance reliability engineer jobs pay per hour?

As of Aug 22, 2026, the average hourly pay for maintenance reliability engineer in Illinois is $25.38, according to ZipRecruiter salary data. Most workers in this role earn between $17.02 and $30.77 per hour, depending on experience, location, and employer.

What is a maintenance reliability engineer?

A Maintenance Reliability Engineer is a professional who focuses on improving the reliability and efficiency of equipment and machinery in industrial settings. They analyze equipment performance data, identify root causes of failures, and develop maintenance strategies to prevent unplanned downtime. Their goal is to optimize maintenance processes, reduce costs, and ensure the safe, continuous operation of production facilities. Maintenance Reliability Engineers often work closely with maintenance teams, operations staff, and other engineering disciplines to implement reliability best practices and predictive maintenance programs.

What are the key skills and qualifications needed to thrive as a maintenance reliability engineer?

To thrive as a Maintenance Reliability Engineer, you need a solid background in engineering principles, reliability analysis, and failure modes, usually supported by a degree in mechanical, electrical, or industrial engineering. Familiarity with Computerized Maintenance Management Systems (CMMS), predictive maintenance tools, and certifications like Certified Maintenance & Reliability Professional (CMRP) are often required. Strong problem-solving abilities, effective communication, and a proactive mindset are crucial soft skills for success in this role. These competencies ensure equipment uptime, optimize maintenance strategies, and drive operational efficiency within industrial environments.

How does a maintenance reliability engineer typically collaborate with production and operations teams to improve equipment performance?

Maintenance Reliability Engineers frequently work alongside production and operations teams to identify recurring equipment issues, analyze root causes, and implement solutions that enhance overall asset reliability. This collaboration often involves regular meetings, reviewing equipment data together, and jointly prioritizing maintenance tasks to minimize disruptions to production schedules. By building strong communication channels, engineers ensure that maintenance strategies align with operational goals, leading to more efficient processes and reduced downtime.

What is the difference between Maintenance Reliability Engineer vs Maintenance Technician?

AspectMaintenance Reliability EngineerMaintenance Technician
CredentialsBachelor's degree in engineering or related field; certifications like CMRT or CRL often preferredHigh school diploma or technical training; certifications like EPA or OSHA may be required
Work EnvironmentDesigning reliability strategies, analyzing data, improving systems in industrial settingsPerforming routine maintenance, repairs, and troubleshooting on equipment
Industry UsageUsed across manufacturing, energy, and process industries focusing on system reliabilityCommonly employed in factories, plants, and facilities for equipment upkeep

The Maintenance Reliability Engineer focuses on analyzing data and developing strategies to improve equipment reliability, while the Maintenance Technician handles hands-on repairs and maintenance tasks. Both roles are essential in industrial settings but differ in scope and responsibilities.

Infographic showing various Maintenance Reliability Engineer job openings in Illinois as of August 2026, with employment types broken down into 1% As Needed, 85% Full Time, 11% Part Time, 2% Contract, and 1% Nights. Highlights an 97% Physical, 1% Hybrid, and 2% Remote job distribution, with an average salary of $52,794 per year, or $25.4 per hour.

Process Reliability Engineer

Entegris

Aurora, IL • On-site

$101K - $127K/yr

Full-time

Medical, Dental, Vision, Retirement, PTO

Re-posted 15 days ago


Entegris rating

8.2

Company rating: 8.2 out of 10

Based on 40 frontline employees who took The Breakroom Quiz

87th of 544 rated manufacturers


Job description

Job Title:
Process Reliability Engineer
Job Description:
The Role
Entegris is currently seeking a Process Reliability Engineer to join our Engineering & Maintenance team. This position will be based in our Aurora, Illinois facility. This position is embedded within the 845 Slurry production area, one of our core manufacturing operations supporting advanced semiconductor fabrication.
In this role, you will serve as the technical subject matter expert for process and support equipment reliability across the Slurry production area. You will drive improvements in equipment uptime, asset lifecycle management, and maintenance effectiveness while collaborating with Operations, Maintenance, and Engineering teams to deliver safe, consistent, and high-quality manufacturing results.
The position reports to the Senior Maintenance Manager.
What You'll Do
Reliability Analysis & Asset Lifecycle Planning
  • Build and maintain the Criticality Analysis plus Critical Spare Parts assessments for all production equipment.

  • Develop and maintain an equipment replacement/repair roadmap driven by reliability data, asset age, and lifecycle cost analysis.

  • Calculate equipment reliability metrics (MTTR, MTBF, etc.) and perform root cause failure analyses (RCFA) to identify failure patterns, prioritize maintenance resources, and reduce unplanned downtime.

  • Build Reliability Block Diagrams (RBD) for critical systems to assess single-point-of-failure risks and model overall system availability (OEE).

Factory Floor Technical Support - Provide SME technical support for key production systems (chemical addition, batch-making, product filling, ultra-pure water, hot oil, process chillers, wastewater, etc.), ensuring uptime and optimal performance. Identify opportunities and run associated projects to improve overall system design.
Project Management: Lead small to medium scale capital and CI projects from inception through completion. Responsibilities include budgeting, project definition utilizing front end loading (FEL), securing funding, following through to commissioning/start up, providing project status updates, managing and completing all aspects of commissioning, and project closure/lessons learned.
Maintenance Support: Develop and refine preventive and reactive maintenance procedures and spare parts inventory processes using tools like SAP-PM, Parsable, SharePoint, and Reliance. Train maintenance personnel as warranted.
Engineering Documentation: Manage and produce engineering drawings (P&IDs, electrical schematics, etc.) and documentation (equipment specifications, maintenance repair procedures) using AutoCAD and similar tools.
EHS Support: Participate in Environmental, Health, and Safety projects focusing on process safety management, ergonomic improvements, and compliance with safety standards. Support and lead EHS teams as needed.
Continuous Learning and Improvement: Stay informed of industry trends, new technologies, and best practices to continually enhance your knowledge and the company's manufacturing capabilities.
What We Seek
Education & Experience
  • Bachelor's degree in Chemical, Mechanical, or Electrical Engineering required.

  • Minimum 5 years of experience in a manufacturing environment, preferably in the chemical, specialty materials, or semiconductor supply chain industry.

Technical Skills
  • Proficiency with CMMS platforms, specifically SAP-PM; experience with Parsable, SharePoint, Reliance, and MS Project is beneficial.

  • Proficient with Microsoft Office Suite; AutoCAD experience required for P&ID and schematic management.

  • Knowledge of predictive and preventive maintenance methodologies, failure analysis, risk management, and lifecycle asset management.

  • Familiarity with batch manufacturing, piping systems, dispersion and separation process equipment, utility systems, and PLC operation preferred.

Core Competencies
  • Demonstrated ability to lead projects, manage competing priorities, and deliver results in a dynamic manufacturing environment.

  • Excellent problem-solving skills with a data-driven approach to decision-making.

  • Strong verbal and written communication skills; ability to present technical content to both technical and non-technical audiences.

  • Collaborative team player who drives results through influence and partnership across operations, maintenance, and engineering functions.

Additional Qualifications
  • Familiarity with health, safety, and environmental regulations in a manufacturing context required.

  • Six Sigma Green Belt certification is a plus.

  • Ability to lift up to 25 lbs; ability to work in a chemical manufacturing environment.

Why Work at Entegris
Lead. Inspire. Innovate. Define Your Future.
Not everyone who works for a global company shares the same background, experiences and perspectives. We leverage the differences of our employees to bring new ideas to the table. Every employee throughout the company is encouraged to share input on projects and initiatives. Our decision-making process is truly a collaborative effort as we realize there are leaders at every level of the organization. We put our values at the core of how we operate as an organization - not just when it's convenient, but in a lasting and meaningful way. We want the time and energy you spend here to have a positive impact on your life inside and outside of the office.
What We Offer
Our total rewards package goes above and beyond just a paycheck. Whether you're looking to build your career, improve your health, or protect your wealth, we offer generous benefits to help you achieve your goals.
  • Compensation: $91,000 - $122,500 per year range with actual pay dependent on candidate overall skills for the role
  • Annual bonus eligibility
  • Progressive paid time off policy that empowers you to take the time you need to recharge
  • Generous 401(K) plan with an impressive employer match with no delayed vesting
  • Excellent health, dental and vision insurance packages to fit your needs
  • Education assistance to support your learning journey
  • A values-driven culture with colleagues that rally around People, Accountability, Creativity and Excellence

Entegris does not provide immigration-related sponsorship for this role. Do not apply for this role if you will need Entegris immigration sponsorship (e.g., H1B, TN, STEM OPT, etc.) now or in the future.
At Entegris we are committed to providing equal opportunity to all employees and applicants. Our policy is to recruit, hire, train, and reward employees for their individual abilities, achievements, and experience without regard to race, color, religion, sexual orientation, age, national origin, disability, marital or military status.
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