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Lithography Process Engineer Jobs in Boston, MA (NOW HIRING)

Use direct-write electron beam lithography to fabricate nanostructures * Develop materials and ... engineering, physics, etc) * Direct hands-on experience in: * semiconductor wafer processing ...

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Lithography Process Engineer information

See Boston, MA salary details

$53.8K

$100K

$154.8K

How much do lithography process engineer jobs pay per year?

As of Jul 29, 2026, the average yearly pay for lithography process engineer in Boston, MA is $99,968.00, according to ZipRecruiter salary data. Most workers in this role earn between $80,900.00 and $111,900.00 per year, depending on experience, location, and employer.

What are the key skills and qualifications needed to thrive as a Lithography Process Engineer, and why are they important?

To thrive as a Lithography Process Engineer, you need a solid background in semiconductor manufacturing, photolithography principles, and a degree in engineering or a related field. Familiarity with lithography equipment (e.g., steppers, scanners), process control software, and statistical analysis tools is typically required. Strong problem-solving skills, attention to detail, and effective communication help you collaborate with cross-functional teams and address process challenges. These skills and qualifications are essential to optimize yields, maintain quality standards, and drive innovation in semiconductor fabrication.

What does a Lithography Process Engineer do?

A Lithography Process Engineer is responsible for developing, optimizing, and maintaining the photolithography processes used in semiconductor manufacturing. They work with advanced equipment to transfer circuit patterns onto silicon wafers, ensuring high precision and yield. Their role involves troubleshooting process issues, improving process reliability, and collaborating with other engineering teams to support production goals. Lithography Process Engineers also stay up-to-date with new technologies and methods to continuously enhance manufacturing efficiency.

What is the difference between Lithography Process Engineer vs Semiconductor Process Engineer?

AspectLithography Process EngineerSemiconductor Process Engineer
CredentialsBachelor's or Master's in Electrical Engineering, Materials Science, or related fields; certifications in process engineeringBachelor's or Master's in Chemical, Electrical, or Materials Engineering; similar certifications
Work EnvironmentCleanroom environments focused on photolithography steps in chip fabricationCleanroom or fab environments covering multiple process steps in semiconductor manufacturing
Industry UsagePrimarily in semiconductor fabrication plants, focusing on lithography processesAcross semiconductor manufacturing, including process development and production

While both roles operate in semiconductor manufacturing and require similar technical backgrounds, the Lithography Process Engineer specializes in photolithography techniques, whereas the Semiconductor Process Engineer oversees broader process steps. The Lithography Process Engineer focuses on patterning and imaging, making their role more specialized within the manufacturing process.

What are some common challenges faced by Lithography Process Engineers and how can they be addressed?

Lithography Process Engineers often encounter challenges such as managing process variability, minimizing defects, and optimizing equipment performance to achieve precise patterning on semiconductor wafers. These challenges require strong problem-solving skills, attention to detail, and effective collaboration with cross-functional teams like equipment engineers and process integration specialists. Staying up-to-date with the latest lithography technologies and maintaining rigorous process controls can help address these issues, ensuring high yields and efficient production.
What are popular job titles related to Lithography Process Engineer jobs in Boston, MA? For Lithography Process Engineer jobs in Boston, MA, the most frequently searched job titles are:
Infographic showing various Lithography Process Engineer job openings in Boston, MA as of July 2026, with employment types broken down into 1% Locum Tenens, 91% Full Time, 4% Part Time, and 4% Contract. Highlights an 88% Physical, 5% Hybrid, and 7% Remote job distribution, with an average salary of $99,968 per year, or $48.1 per hour.

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Posted 7 days ago


Job description

Laser Process Engineer

A Senior Process Engineer shall lead the support, improvement and capability of production and new device development. The successful candidate will lead thin film activities from design, deposition, lithography and characterization of the III-V semiconductor structures using wet and dry processing techniques. 

Responsibilities

  • Plan and monitor lithography/deposition/etch process control
  •  Develop/improve tooling, fixtures and in situ monitoring techniques for use in lithography/deposition/etch work cells
  •  Provide project leadership on thin film related projects, and technical consultation to the product development and process integration teams 
  •  Train and mentor engineers and technicians
  •  Write and verify procedures and work instructions