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Axcelis Technologies
Axcelis Technologies

60 Axcelis Technologies Senior Software Engineer Jobs Hiring Near You

Axcelis Technologies

Senior Mechanical Engineer

Beverly, MA · On-site

$121K - $181K/yr

Senior Mechanical Engineer Axcelis is seeking a Senior Mechanical Engineer to design and deliver ... Work on high-value, differentiated technology used by leading chip manufacturers * Gain experience ...

Axcelis Technologies

Mechanical Engineer I

Beverly, MA · On-site

$69K - $104K/yr

Experience with 3D CAD software (Creo preferred, or equivalent) * Understanding of mechanical ... Join Axcelis * Work on cutting-edge technology used by leading semiconductor manufacturers ...

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Infographic showing various Senior Software Engineer job openings at Axcelis Technologies in the United States as of August 2026, with employment types broken down into 100% Full Time. Highlights an 100% Physical job distribution.

Senior Software Systems Engineer

Axcelis Technologies

Beverly, MA • On-site

$124K - $187K/yr

Full-time

Re-posted 11 days ago

Job description

JOB DESCRIPTION
Job Description
Senior Software Systems Engineer
Want to discover just how far your intellectual curiosity can take you? You're in the right place. For more than four decades, Axcelis Technologies has been at the forefront of innovation in semiconductor manufacturing technology. Chipmakers around the globe rely on our tools and process expertise to deliver the semiconductors that power modern life from smartphones and computers to cameras and cars. We have become a technology leader by providing the innovation necessary for business to thrive, quality of life to advance, and the environment to flourish-enabling a truly sustainable future.
Our influence is global, with more than 30 offices worldwide, an installed base of thousands worldwide and a customer list that includes the world's largest semiconductor manufacturers. Our team is expanding, and we are currently hiring a Senior Machine Control Software Systems Engineer for our corporate office in Beverly, MA.
Position Background:
This machine control software engineer will write software to control wafer handling functions for Axcelis ion implanter systems. Ion implanter systems are large complex capital equipment systems used by semiconductor manufacturers. These fully automated systems run 24/7 and are used in the manufacture of semiconductor integrated circuits. These systems implant ions into silicon wafers by directing an ion beam onto the wafers. Wafer processing rates exceed 500 wafers per hour and must be exceedingly reliable with maximum uptime and an absolute minimum of failures.
All wafer handling and processing is done in the end station portion of the system. The end station consists of multiple cassettes for bringing wafer to and from the system, a process chamber in a high vacuum environment, multiple robots in the normal atmosphere environment, multiple robots in the vacuum environment, vacuum load locks, aligners, and multiple additional sensors and actuators. Some robots are purchased commercial robots and others are completely custom. Wafer handling control is done using Delta Tau PMAC controllers and commercial servo amplifiers.
Responsibilities:
  • Design, implement, and test machine control software to control new wafer handling features and to make changes to existing wafer handling control methods.
  • Learn and fully understand present wafer handling hardware and robot operations.
  • Learn and fully understand new wafer handling hardware in order to write software to control the hardware.
  • Modify machine control software to add new functionality, to meet new requirements, improve present operation, and to optimize present operation.
  • Operate the wafer handling portion of an ion implantation system in order to develop and test new software and hardware controls.
  • Writes subsystem verification and test routines.
  • Work closely with mechanical, hardware, validation/reliability and manufacturing engineering disciplines.

Basic Qualifications:
  • A minimum of a BS in Electrical/Mechanical Engineering, Computer Science or Computer Engineering. And experience 5+ years, MS prefer.
  • Will have written software to control electrical/mechanical systems & have excellent software skills.
  • Knowledgeable in computer networking architectures, topologies and hardware and communication protocols such as TCP/IP, RS232, RS485, & USB.
  • Must be able to handle multiple tasks, have excellent attention to detail, and be willing and able to learn new technologies quickly.
  • Have a good understanding of electrical/mechanical systems and the ability to understand how things work and be a hands-on person comfortable working in the lab on equipment
  • Good verbal and written communications skills.
  • Semiconductor industry or similar experience is plus. Ion implant is huge plus.
  • Experience with Delta Tau PMAC controllers or other motion controller is plus.
  • Training and/or experience with robots, motors, actuators, and servo systems is a plus.
  • Knowledge/experience with implant is a plus.
  • Knowledge/experience with real time control is a plus.
  • Knowledge/experience with hardware (like FPGA, PCB ... etc.) is a plus.
  • Experience on Embedded hardware/software architecture is a plus.

EQUAL OPPORTUNITY STATEMENT
It is the policy of Axcelis to provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law. Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.
U.S. BASE SALARY RANGE
$124,924.40 - $187,386.60
This base salary range reflects the typical compensation for this role across U.S. locations.
Our salary ranges are determined by role and level; individual pay is determined based on
multiple factors, including job-related skills, experience, relevant education or training, work
location, and internal equity. The range provides the opportunity for growth and progression as
you develop within the role.
Base pay is one part of our U.S. total compensation package which includes eligibility in the
Axcelis Team Incentive bonus plan, and comprehensive benefits package (for regular
employees working 20+ hours a week).

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