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Senior Reliability Engineer Jobs in Chicago, IL (NOW HIRING)

Process Reliability Engineer

Aurora, IL · On-site

$101K - $127K/yr

The position reports to the Senior Maintenance Manager. WhatYou'llDo Reliability Analysis & Asset ... Engineering Documentation : Manage and produce engineering drawings (P&IDs, electrical schematics ...

Staff Site Reliability Engineer

Chicago, IL

$58.75 - $78/hr

As a Staff Site Reliability Engineer at TransUnion, you will serve as a senior technical leader and force multiplier on the SRE team. Operating with full autonomy, you will drive reliability strategy ...

Staff Site Reliability Engineer

Chicago, IL · On-site

$58.75 - $78/hr

As a Staff Site Reliability Engineer at TransUnion, you will serve as a senior technical leader and force multiplier on the SRE team. Operating with full autonomy, you will drive reliability strategy ...

Staff Site Reliability Engineer

Chicago, IL · On-site

$58.75 - $78/hr

As a Staff Site Reliability Engineer at TransUnion, you will serve as a senior technical leader and force multiplier on the SRE team. Operating with full autonomy, you will drive reliability strategy ...

Staff Site Reliability Engineer

Chicago, IL · On-site

$58.75 - $78/hr

As a Staff Site Reliability Engineer at TransUnion, you will serve as a senior technical leader and force multiplier on the SRE team. Operating with full autonomy, you will drive reliability strategy ...

Staff Site Reliability Engineer

Chicago, IL · On-site

$58.75 - $78/hr

As a Staff Site Reliability Engineer at TransUnion, you will serve as a senior technical leader and force multiplier on the SRE team. Operating with full autonomy, you will drive reliability strategy ...

Senior DevOps/SRE Engineer

Chicago, IL · On-site

$140K - $170K/yr

We are looking for a Senior Site Reliability Engineer to work as part of a lean, product‑focused engineering organization. This role is about building and operating reliable cloud‑based systems ...

Senior DevOps/SRE Engineer

Chicago, IL · On-site

$140K - $170K/yr

We are looking for a Senior Site Reliability Engineer to work as part of a lean, product-focused engineering organization. This role is about building and operating reliable cloud-based systems by ...

They're currently seeking a technically skilled and proactive SRE to join the strategy enablement ... Mid-Senior level Employment type * Full-time Job function Referrals increase your chances of ...

Showing results 41-60

Senior Reliability Engineer information

See Chicago, IL salary details

$22

$66

$95

How much do senior reliability engineer jobs pay per hour?

As of Aug 7, 2026, the average hourly pay for senior reliability engineer in Chicago, IL is $66.36, according to ZipRecruiter salary data. Most workers in this role earn between $54.71 and $79.47 per hour, depending on experience, location, and employer.

How much do senior reliability engineers get paid?

Senior reliability engineers typically earn between $90,000 and $130,000 annually, depending on experience, industry, and location. They often have expertise in systems analysis, failure modes, and reliability tools like FMEA and RCM, which can influence compensation levels.

What are the key skills and qualifications needed to thrive as a senior reliability engineer?

To thrive as a Senior Reliability Engineer, you need expertise in reliability engineering principles, root cause analysis, and a relevant engineering degree such as mechanical, electrical, or industrial engineering. Familiarity with tools like FMEA, RCA software, CMMS, and certifications such as Certified Reliability Engineer (CRE) are often required. Strong analytical thinking, communication skills, and the ability to lead cross-functional teams set top performers apart. These skills are essential for minimizing downtime, improving system reliability, and ensuring safe, efficient operations.

What are some common challenges faced by senior reliability engineers, and how are they typically addressed within the team?

Senior Reliability Engineers often encounter challenges such as diagnosing complex system failures, balancing proactive maintenance with urgent reactive fixes, and ensuring consistent communication across multidisciplinary teams. These challenges are typically addressed through root cause analysis, prioritization frameworks, and fostering a culture of knowledge sharing. Regular collaboration with operations, maintenance, and engineering teams helps in developing effective solutions and continuous improvement strategies.

What does a senior reliability engineer do?

A Senior Reliability Engineer is responsible for ensuring that systems, products, or processes operate reliably and efficiently over time. They analyze failure data, design reliability tests, develop maintenance strategies, and work with cross-functional teams to improve system performance and reduce downtime. Their expertise helps organizations minimize risk, optimize lifecycle costs, and maintain high standards of quality and safety. Senior Reliability Engineers often mentor junior team members and play a key role in developing reliability standards and best practices.

What is the difference between Senior Reliability Engineer vs Reliability Engineer?

AspectSenior Reliability EngineerReliability Engineer
CredentialsTypically requires 5+ years experience, certifications like CRE or Six SigmaEntry to mid-level, often with 2-4 years experience, similar certifications
Work EnvironmentDesigns and oversees reliability programs, leads projectsPerforms analysis, supports reliability improvements
Industry UsageUsed across manufacturing, energy, aerospaceCommon in same industries, often as a stepping stone to senior roles

The main difference between a Senior Reliability Engineer and a Reliability Engineer lies in experience, leadership responsibilities, and scope of work. Senior Reliability Engineers typically lead projects and develop strategies, while Reliability Engineers focus on analysis and supporting reliability initiatives. Both roles are vital in ensuring equipment and system dependability across industries.

What are the most commonly searched types of Reliability Engineer jobs in Chicago, IL? The most popular types of Reliability Engineer jobs in Chicago, IL are:
What job categories do people searching Senior Reliability Engineer jobs in Chicago, IL look for? The top searched job categories for Senior Reliability Engineer jobs in Chicago, IL are:
What cities near Chicago, IL are hiring for Senior Reliability Engineer jobs? Cities near Chicago, IL with the most Senior Reliability Engineer job openings:
Infographic showing various Senior Reliability Engineer job openings in Chicago, IL as of July 2026, with employment types broken down into 93% Full Time, 4% Part Time, and 3% Contract. Highlights an 88% Physical, 5% Hybrid, and 7% Remote job distribution, with an average salary of $138,019 per year, or $66.4 per hour.

Process Reliability Engineer

Entegris

Aurora, IL • On-site

$101K - $127K/yr

Full-time

Medical, Dental, Vision, Retirement, PTO

Posted 29 days ago


Entegris rating

8.2

Company rating: 8.2 out of 10

Based on 41 frontline employees who took The Breakroom Quiz

88th of 536 rated manufacturers


Job description

Job Title:

Process Reliability Engineer

Job Description:

The Role

Entegris is currently seeking aProcess Reliability Engineerto join ourEngineering& Maintenanceteam. This position will be based in ourAurora, Illinoisfacility.This position is embedded within the 845 Slurry production area, one of our core manufacturing operations supporting advanced semiconductor fabrication.

In this role, you will serve as the technical subject matter expert forprocessandsupportequipment reliability across the Slurry production area. You will drive improvements in equipment uptime, asset lifecycle management, and maintenance effectiveness while collaborating with Operations, Maintenance, and Engineering teams to deliver safe, consistent, and high-quality manufacturing results.

The position reports to the Senior Maintenance Manager.

WhatYou'llDo

Reliability Analysis & Asset Lifecycle Planning

  • Build andmaintainthe Criticality Analysis plus Critical Spare Parts assessments for all production equipment.

  • Develop and maintain an equipment replacement/repair roadmap driven by reliability data, asset age, and lifecycle cost analysis.

  • Calculate equipment reliability metrics (MTTR, MTBF, etc.) and perform root cause failure analyses (RCFA) toidentifyfailure patterns, prioritize maintenance resources, and reduce unplanned downtime.

  • Build Reliability Block Diagrams (RBD) for critical systems to assess single-point-of-failure risks and model overall system availability (OEE).

Factory Floor Technical Support- Provide SME technical support for key production systems (chemical addition, batch-making, product filling, ultra-pure water, hot oil, process chillers, wastewater, etc.), ensuring uptime andoptimalperformance.Identifyopportunities and run associated projects to improve overall system design.

Project Management: Lead small tomedium scalecapital and CI projects frominceptionthrough completion. Responsibilities include budgeting, project definitionutilizingfront end loading (FEL), securing funding, following through to commissioning/start up, providing project status updates,managingand completing all aspects of commissioning, and project closure/lessons learned.

Maintenance Support: Develop and refine preventive and reactive maintenance procedures and spare parts inventory processes using tools like SAP-PM,Parsable, SharePoint, and Reliance. Train maintenance personnel aswarranted.

Engineering Documentation: Manage and produce engineering drawings (P&IDs, electrical schematics, etc.) and documentation (equipment specifications, maintenance repair procedures) using AutoCAD and similar tools.

EHS Support:Participatein Environmental, Health, and Safety projects focusing on process safety management, ergonomic improvements, and compliance with safety standards. Support and lead EHS teams as needed.

Continuous Learning and Improvement: Stay informed of industry trends,new technologies, and best practices to continually enhance your knowledge and the company's manufacturing capabilities.

WhatWeSeek

Education & Experience

  • Bachelor's degree in Chemical, Mechanical, or Electrical Engineeringrequired.

  • Minimum 5 years of experience in a manufacturing environment, preferably in the chemical, specialty materials, or semiconductor supply chain industry.

Technical Skills

  • Proficiencywith CMMS platforms, specifically SAP-PM; experience withParsable, SharePoint, Reliance, and MS Projectisbeneficial.

  • Proficient with Microsoft Office Suite; AutoCAD experiencerequiredfor P&ID and schematic management.

  • Knowledge of predictive and preventive maintenance methodologies, failure analysis, risk management, and lifecycle asset management.

  • Familiarity with batch manufacturing, piping systems, dispersion and separation process equipment, utility systems, and PLC operation preferred.

Core Competencies

  • Demonstrated ability to lead projects, manage competing priorities, and deliver results in a dynamic manufacturing environment.

  • Excellent problem-solving skills with a data-driven approach to decision-making.

  • Strong verbal and written communication skills; ability to present technical content to both technical and non-technical audiences.

  • Collaborative team player who drives results through influence and partnership across operations, maintenance, and engineering functions.

Additional Qualifications

  • Familiarity with health, safety, and environmental regulations in a manufacturing contextrequired.

  • Six Sigma Green Belt certification is a plus.

  • Ability tolift upto 25lbs; ability to work in a chemical manufacturing environment.

Why Work at Entegris

Lead. Inspire. Innovate. Define Your Future.

Not everyone who works for a global company shares the same background,experiences and perspectives. Weleveragethe differences of our employees to bringnew ideasto the table. Every employee throughout the company isencouraged to share input on projects and initiatives. Our decision-makingprocess is truly a collaborative effort as we realize there are leaders at everylevel of the organization. We put our values at the core of how weoperateas anorganization - not just whenit'sconvenient, but in a lasting and meaningfulway. We want the time and energy you spend here to have a positive impact onyourlife inside and outside of the office.

WhatWeOffer

Ourtotalrewardspackagegoesaboveandbeyondjustapaycheck.Whetheryou'relooking to build your career, improve your health, or protect your wealth, we offer generous benefits to help you achieve your goals.

  • Compensation: $91,000 - $122,500 per year range with actual pay dependent on candidate overall skills for the role

  • Annual bonus eligibility

  • Progressive paid time off policy that empowers you to take the time you need to recharge

  • Generous 401(K) plan with an impressive employer match with no delayed vesting

  • Excellent health, dental and vision insurance packages to fit your needs

  • Education assistance to support your learning journey

  • A values-driven culture with colleagues that rally around People, Accountability, Creativity and Excellence

Entegris does not provide immigration-related sponsorship for this role. Do not apply for this role if you will need Entegris immigration sponsorship (e.g., H1B, TN, STEM OPT, etc.) now or in the future.

At Entegris we are committed toprovidingequal opportunitytoall employees and applicants. Our policy is to recruit, hire, train, and reward employees for their individual abilities, achievements, and experience without regard to race, color, religion, sexual orientation, age, national origin, disability, marital or military status.

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