Senior Mems Process Engineer information
See Oak Ridge, TN salary details
$88.3K - $96.6K
11% of jobs
$99.2K is the 25th percentile. Wages below this are outliers.
$96.6K - $104.9K
16% of jobs
The median wage is $111.5K / yr.
$104.9K - $113.2K
18% of jobs
$113.2K - $121.5K
15% of jobs
$125.8K is the 75th percentile. Wages above this are outliers.
$121.5K - $129.8K
13% of jobs
$129.8K - $138.1K
7% of jobs
$138.1K - $146.4K
5% of jobs
$146.4K - $154.7K
4% of jobs
$154.7K - $163K
2% of jobs
How much do senior mems process engineer jobs pay per year?
As of Aug 17, 2026, the average yearly pay for senior mems process engineer in Oak Ridge, TN is $115,792.00, according to ZipRecruiter salary data. Most workers in this role earn between $99,400.00 and $128,600.00 per year, depending on experience, location, and employer.
Senior MEMS Process Engineers are experienced professionals who design, develop, and optimize processes for fabricating Micro-Electro-Mechanical Systems (MEMS) devices. They work in cleanroom environments, collaborating with cross-functional teams to create miniaturized sensors, actuators, and other microdevices used in industries like automotive, medical, and consumer electronics. Their responsibilities include process integration, troubleshooting, yield improvement, and ensuring manufacturing scalability. Senior engineers often mentor junior staff and contribute to technology roadmaps within their organizations.
To thrive as a Senior MEMS Process Engineer, you need a solid background in microfabrication, semiconductor processing, and materials science, typically backed by a degree in electrical engineering, physics, or a related field. Proficiency with cleanroom equipment, photolithography tools, and simulation software like COMSOL or CoventorWare, as well as experience with process control systems, is essential. Strong problem-solving abilities, attention to detail, and effective communication skills help you collaborate across multidisciplinary teams and manage complex projects. These skills are crucial for developing innovative MEMS devices, ensuring process reliability, and driving technological advancements in the field.
Senior MEMS Process Engineers often encounter challenges such as process variability, yield improvement, and integrating new materials or technologies. Tackling these issues usually involves close collaboration with cross-functional teams, including design, fabrication, and quality assurance. Regular data analysis, root cause investigations, and process optimizations are common strategies. Sharing best practices and leveraging team expertise helps in developing robust solutions, ensuring high device performance and reliability.
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